Devices with embedded channels.

Burg, T. P.

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Devices with embedded channels.

Burg, T. P. (2015). Devices with embedded channels. In O. Brand, I. Dufour, S. Heinrich, & F. Josse (Eds.), Resonant MEMS: fundamentals, implementation, and application (pp. 261-286). Weinheim: Wiley-VCH.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-CA45-4 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-CD6B-C

Genre: Book Chapter

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http://eu.wiley.com/WileyCDA/WileyTitle/productCd-3527335455.html (Table of contents) Open Access status unknown

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Creators:
Burg, T. P.¹, Author

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1Research Group of Biological Micro- and Nanotechnology, MPI for biophysical chemistry, Max Planck Society, ou_578602

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Language(s): eng - English

Dates: Published Online: 2015-04Date issued: 2015

Publication Status: Issued

Pages: XXV, 483

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Rev. Type: No review

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Title: Resonant MEMS: fundamentals, implementation, and application

Source Genre: Book

Creator(s):
Brand, O., Editor
Dufour, I., Editor
Heinrich, S., Editor
Josse, F., Editor

Affiliations:
-

Publ. Info: Weinheim : Wiley-VCH

Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 261 - 286 Identifier: ISBN: 978-3-527-33545-9

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Title: Advanced micro and nanosystems

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Pages: - Volume / Issue: 11 Sequence Number: - Start / End Page: - Identifier: -