Energy transfer into the growing film during sputter deposition: An 
investigation by calorimetric measurements and Monte Carlo simulations

Drusedau, T. P.; Bock, T.; John, T. M.; Klabunde, F.; Eckstein, W.

doi:10.1116/1.581957

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Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations

Drusedau, T. P., Bock, T., John, T. M., Klabunde, F., & Eckstein, W. (1999). Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations. Journal of Vaccum Science and Technology A, 17(5), 2896-2905. doi:10.1116/1.581957.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-84FD-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-84FE-7

Genre: Journal Article

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Creators:
Drusedau, T. P.¹, Author
Bock, T.¹, Author
John, T. M.¹, Author
Klabunde, F.¹, Author
Eckstein, W.², Author

Affiliations:
1Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, PF 4120, 39016 Magdeburg, Germany, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1999

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 625168
DOI: 10.1116/1.581957
URI: http://dx.doi.org/10.1116/1.581957

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Title: Journal of Vaccum Science and Technology A

Source Genre: Journal

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Pages: - Volume / Issue: 17 (5) Sequence Number: - Start / End Page: 2896 - 2905 Identifier: -