The influence of surface roughness on the angular dependence of the sputter 
yield

Küstner, M.; Eckstein, W.; Dose, V.; Roth, J.

doi:10.1016/S0168-583X(98)00399-1

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The influence of surface roughness on the angular dependence of the sputter yield

Küstner, M., Eckstein, W., Dose, V., & Roth, J. (1998). The influence of surface roughness on the angular dependence of the sputter yield. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 145(3), 320-331. doi:10.1016/S0168-583X(98)00399-1.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-87D9-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-87DA-A

Genre: Journal Article

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Creators:
Küstner, M.¹, Author
Eckstein, W.², Author
Dose, V.², Author
Roth, J.², Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1998

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 626586
DOI: 10.1016/S0168-583X(98)00399-1
URI: http://dx.doi.org/10.1016/S0168-583X(98)00399-1

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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Source Genre: Journal

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Pages: - Volume / Issue: 145 (3) Sequence Number: - Start / End Page: 320 - 331 Identifier: -