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  Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

Behrisch, R., Grigull, S., Kreissig, U., & Grötzschel, R. (1998). Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 136-138, 628-632. doi:10.1016/S0168-583X(97)00798-2.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-88A2-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-88A3-D
Genre: Journal Article

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 Creators:
Behrisch, R.1, Author           
Grigull, S.2, Author           
Kreissig, U.3, Author
Grötzschel, R.3, Author
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2External Organizations, ou_persistent22              
3Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf, D-01314 Dresden, Germany, ou_persistent22              

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Free keywords: 13th International Conference on Ion Beam Analysis (IBA-13), Lisbon, 1997-07-27 to 1997-08-01
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Language(s): eng - English
 Dates: 1998
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 627876
DOI: 10.1016/S0168-583X(97)00798-2
URI: http://dx.doi.org/10.1016/S0168-583X(97)00798-2
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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Elsevier B.V.
Pages: - Volume / Issue: 136-138 Sequence Number: - Start / End Page: 628 - 632 Identifier: -