Influence of surface roughness on measuring depth profiles and the total amount 
of implanted ions by RBS and ERDA

Behrisch, R.; Grigull, S.; Kreissig, U.; Grötzschel, R.

doi:10.1016/S0168-583X(97)00798-2

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Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

Behrisch, R., Grigull, S., Kreissig, U., & Grötzschel, R. (1998). Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 136-138, 628-632. doi:10.1016/S0168-583X(97)00798-2.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-88A2-F Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-88A3-D

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Urheber:
Behrisch, R.¹, Autor
Grigull, S.², Autor
Kreissig, U.³, Autor
Grötzschel, R.³, Autor

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22
3Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf, D-01314 Dresden, Germany, ou_persistent22