Multivariate analysis of noise-corrupted PECVD data

von Keudell, A.; Annen, A.; Dose, V.

doi:10.1016/S0040-6090(97)00313-1

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Multivariate analysis of noise-corrupted PECVD data

von Keudell, A., Annen, A., & Dose, V. (1997). Multivariate analysis of noise-corrupted PECVD data. Thin Solid Films, 307, 65-70. doi:10.1016/S0040-6090(97)00313-1.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8989-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-898A-0

Genre: Journal Article

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Creators:
von Keudell, A.¹, Author
Annen, A.¹, Author
Dose, V.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1997

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 233780
DOI: 10.1016/S0040-6090(97)00313-1

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Title: Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 307 Sequence Number: - Start / End Page: 65 - 70 Identifier: ISSN: 00406090