Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = 
Quantitative Determination of the Particle Fluxes Emanating from Methane ECR 
Plasmas

Pecher, P.

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Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas

Pecher, P. (1997). Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas. PhD Thesis, Universität, Bayreuth.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8994-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8995-3

Genre: Thesis

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Creators:
Pecher, P.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): deu - German

Dates: Accepted: 1997

Publication Status: Accepted / In Press

Pages: 112 p.

Publishing info: Bayreuth : Universität

Table of Contents: -

Rev. Type: -

Identifiers: eDoc: 268459

Degree: PhD

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