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  Surface reactions during plasma-enhanced chemical vapor deposition of hydrocarbon films

Keudell, A. v. (1997). Surface reactions during plasma-enhanced chemical vapor deposition of hydrocarbon films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 125(1-4), 323-327. doi:10.1016/S0168-583X(96)00893-2.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8A18-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8A19-6
Genre: Journal Article

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 Creators:
Keudell, A. von1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Free keywords: 11th International Workshop on Inelastic Ion-Surface Collisions, Wangerooge, Germany, 1996-09-22 to 1996-09-27
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Language(s): eng - English
 Dates: 1997
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 624766
DOI: 10.1016/S0168-583X(96)00893-2
URI: http://www.sciencedirect.com/science/article/pii/S0168583X96008932
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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 125 (1-4) Sequence Number: - Start / End Page: 323 - 327 Identifier: -