Temporal aspects of sputtering of TaC, C, and Ta targets

Vichev, R. G.; Eckstein, W.

doi:10.1016/S0168-583X(96)00822-1

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Temporal aspects of sputtering of TaC, C, and Ta targets

Vichev, R. G., & Eckstein, W. (1997). Temporal aspects of sputtering of TaC, C, and Ta targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 122(2), 215-223. doi:10.1016/S0168-583X(96)00822-1.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8A55-D Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8A56-B

Genre: Journal Article

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Creators:
Vichev, R. G., Author
Eckstein, W.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1997

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 625210
DOI: 10.1016/S0168-583X(96)00822-1
URI: http://www.sciencedirect.com/science/article/pii/S0168583X96008221

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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Source Genre: Journal

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Pages: - Volume / Issue: 122 (2) Sequence Number: - Start / End Page: 215 - 223 Identifier: -