Effect of the fibre target structure on the spatial distributions of sputtered 
atoms

Eckstein, W.; Mashkova, E. S.; Molchanov, V. A.; Tolmachev, A. I.

doi:10.1016/0168-583X(95)01560-4

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Effect of the fibre target structure on the spatial distributions of sputtered atoms

Eckstein, W., Mashkova, E. S., Molchanov, V. A., & Tolmachev, A. I. (1996). Effect of the fibre target structure on the spatial distributions of sputtered atoms. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 115(1-4), 482-484. doi:10.1016/0168-583X(95)01560-4.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8D1A-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8D1B-8

Genre: Journal Article

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Creators:
Eckstein, W.¹, Author
Mashkova, E. S., Author
Molchanov, V. A., Author
Tolmachev, A. I., Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Free keywords: 16th International Conference on Atomic Collisions in Solids (ICACS-16), Linz, Austria, 1995-07-17 to 1995-07-21

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Language(s): eng - English

Dates: Date issued: 1996

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 626338
DOI: 10.1016/0168-583X(95)01560-4
URI: http://www.sciencedirect.com/science/article/pii/0168583X95015604

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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Source Genre: Journal

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Pages: - Volume / Issue: 115 (1-4) Sequence Number: - Start / End Page: 482 - 484 Identifier: -