A novel setup for spectroscopic ellipsometry using an acousto‐optic tuneable 
filter

Fukarek, W.; Keudell, A. von

doi:10.1063/1.1145466

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A novel setup for spectroscopic ellipsometry using an acousto‐optic tuneable filter

Fukarek, W., & Keudell, A. v. (1995). A novel setup for spectroscopic ellipsometry using an acousto‐optic tuneable filter. Review of Scientific Instruments, 66(6), 3545-3550. doi:10.1063/1.1145466.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8EB3-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8EB4-C

Genre: Journal Article

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Creators:
Fukarek, W.¹, Author
Keudell, A. von², Author

Affiliations:
1Max Planck Society, ou_persistent13
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1995

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 627727
DOI: 10.1063/1.1145466
URI: http://rsi.aip.org/resource/1/rsinak/v66/i6/p3545_s1

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Title: Review of Scientific Instruments

Source Genre: Journal

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Pages: - Volume / Issue: 66 (6) Sequence Number: - Start / End Page: 3545 - 3550 Identifier: -