Computer simulation of ion-beam assisted film growth

Möller, W.

doi:10.1016/0168-583X(94)95192-6

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Computer simulation of ion-beam assisted film growth

Möller, W. (1994). Computer simulation of ion-beam assisted film growth. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 89(1-4), 322-324. doi:10.1016/0168-583X(94)95192-6.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-908D-4 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-908E-2

Genre: Journal Article

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Möller, W.¹, Author

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1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Free keywords: 3rd European Conference on Accelerators in Applied Research and Technology (ECAART-3), Orleans, France, 1993-08-31 to 1993-09-04

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Language(s): eng - English

Dates: Date issued: 1994

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 629509
DOI: 10.1016/0168-583X(94)95192-6
URI: http://www.sciencedirect.com/science/article/pii/0168583X94951926

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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Source Genre: Journal

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Pages: - Volume / Issue: 89 (1-4) Sequence Number: - Start / End Page: 322 - 324 Identifier: -