Absolute density determination of CH radicals in a methane plasma

Jacob, W.; Engelhard, M.; Möller, W.; Koch, A.

doi:10.1063/1.110949

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Absolute density determination of CH radicals in a methane plasma

Jacob, W., Engelhard, M., Möller, W., & Koch, A. (1994). Absolute density determination of CH radicals in a methane plasma. Applied Physics Letters, 64(8), 971-973. doi:10.1063/1.110949.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-90C7-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-90C8-D

Genre: Journal Article

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Creators:
Jacob, W.¹, Author
Engelhard, M.², Author
Möller, W.¹, Author
Koch, A., Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22

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Language(s): eng - English

Dates: Date issued: 1994

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 629779
DOI: 10.1063/1.110949
URI: http://apl.aip.org/resource/1/applab/v64/i8/p971_s1

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Title: Applied Physics Letters

Source Genre: Journal

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Pages: - Volume / Issue: 64 (8) Sequence Number: - Start / End Page: 971 - 973 Identifier: -