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  Modeling of ion-assisted deposition using BCA computer simulation

Möller, W. (1994). Modeling of ion-assisted deposition using BCA computer simulation. Radiation Effects and Defects in Solids, 130, 353-366. doi:10.1080/10420159408219796.

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 Creators:
Möller, W.1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 1994
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Degree: -

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Title: Radiation Effects and Defects in Solids
Source Genre: Journal
 Creator(s):
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Publ. Info: -
Pages: - Volume / Issue: 130 Sequence Number: - Start / End Page: 353 - 366 Identifier: -