Absolute CH Radical Density Measurements in an ECR Methane Plasma

Engelhard, M.; Jacob, W.; Moeller, W.

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Absolute CH Radical Density Measurements in an ECR Methane Plasma

Engelhard, M., Jacob, W., & Moeller, W. (1993). Absolute CH Radical Density Measurements in an ECR Methane Plasma. In J. E. Harry (Ed.), 11th International Symposium on Plasma Chemistry. Symposium Proceedings (pp. 1392-1397).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-91CE-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-91CF-8

Genre: Conference Paper

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Creators:
Engelhard, M.¹, Author
Jacob, W.², Author
Moeller, W.², Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1993

Publication Status: Issued

Pages: -

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Table of Contents: -

Rev. Type: Internal

Identifiers: eDoc: 630210

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Title: 11th International Symposium on Plasma Chemistry (ISPC 11)

Place of Event: Loughborough

Start-/End Date: 1993-08-22 - 1993-08-27

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Title: 11th International Symposium on Plasma Chemistry. Symposium Proceedings

Source Genre: Proceedings

Creator(s):
Harry, J. E., Editor

Affiliations:
-

Publ. Info: -

Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1392 - 1397 Identifier: -