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  Absolute CH Radical Density Measurements in an ECR Methane Plasma

Engelhard, M., Jacob, W., & Moeller, W. (1993). Absolute CH Radical Density Measurements in an ECR Methane Plasma. In J. E. Harry (Ed.), 11th International Symposium on Plasma Chemistry. Symposium Proceedings (pp. 1392-1397).

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 Creators:
Engelhard, M.1, Author           
Jacob, W.2, Author           
Moeller, W.2, Author           
Affiliations:
1External Organizations, ou_persistent22              
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 1993
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Internal
 Identifiers: eDoc: 630210
 Degree: -

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Title: 11th International Symposium on Plasma Chemistry (ISPC 11)
Place of Event: Loughborough
Start-/End Date: 1993-08-22 - 1993-08-27

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Title: 11th International Symposium on Plasma Chemistry. Symposium Proceedings
Source Genre: Proceedings
 Creator(s):
Harry, J. E., Editor
Affiliations:
-
Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1392 - 1397 Identifier: -