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  Ion and Neutral Fluxes onto the Substrate from a DC Discharge in Methane

Lange, K., Jacob, W., & Moeller, W. (1993). Ion and Neutral Fluxes onto the Substrate from a DC Discharge in Methane. In J. E. Harry (Ed.), 11th International Symposium on Plasma Chemistry. Symposium Proceedings (pp. 1266-1271).

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 Creators:
Lange, K.1, Author              
Jacob, W.1, Author              
Moeller, W.1, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 1993
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Internal
 Identifiers: eDoc: 630226
 Degree: -

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Title: 11th International Symposium on Plasma Chemistry (ISPC 11)
Place of Event: Loughborough
Start-/End Date: 1993-08-22 - 1993-08-27

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Title: 11th International Symposium on Plasma Chemistry. Symposium Proceedings
Source Genre: Proceedings
 Creator(s):
Harry, J. E., Editor
Affiliations:
-
Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1266 - 1271 Identifier: -