Ion and Neutral Fluxes onto the Substrate from a DC Discharge in Methane

Lange, K.; Jacob, W.; Moeller, W.

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Ion and Neutral Fluxes onto the Substrate from a DC Discharge in Methane

Lange, K., Jacob, W., & Moeller, W. (1993). Ion and Neutral Fluxes onto the Substrate from a DC Discharge in Methane. In J. E. Harry (Ed.), 11th International Symposium on Plasma Chemistry. Symposium Proceedings (pp. 1266-1271).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-91D6-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-91D7-3

Genre: Conference Paper

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Creators:
Lange, K.¹, Author
Jacob, W.¹, Author
Moeller, W.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Published in Print: 1993

Publication Status: Published in print

Pages: -

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Table of Contents: -

Rev. Type: Internal

Identifiers: eDoc: 630226

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Title: 11th International Symposium on Plasma Chemistry (ISPC 11)

Place of Event: Loughborough

Start-/End Date: 1993-08-22 - 1993-08-27

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Title: 11th International Symposium on Plasma Chemistry. Symposium Proceedings

Source Genre: Proceedings

Creator(s):
Harry, J. E., Editor

Affiliations:
-

Publ. Info: -

Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1266 - 1271 Identifier: -