Threshold energy for sputtering and its dependence on angle of incidence

Eckstein, W.; Garcia-Rosales, C.; Roth, J.; László, J.

doi:10.1016/0168-583X(93)95913-P

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Threshold energy for sputtering and its dependence on angle of incidence

Eckstein, W., Garcia-Rosales, C., Roth, J., & László, J. (1993). Threshold energy for sputtering and its dependence on angle of incidence. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 83(1-2), 95-109. doi:10.1016/0168-583X(93)95913-P.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9211-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9212-8

Genre: Journal Article

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Creators:
Eckstein, W.¹, Author
Garcia-Rosales, C.¹, Author
Roth, J.¹, Author
László, J., Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1993

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 631691
DOI: 10.1016/0168-583X(93)95913-P
URI: http://www.sciencedirect.com/science/article/pii/0168583X9395913P

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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Source Genre: Journal

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Pages: - Volume / Issue: 83 (1-2) Sequence Number: - Start / End Page: 95 - 109 Identifier: -