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  Moving‐coil waveguide discharge for inner coating of metal tubes

Hytry, R., Möller, W., Wilhelm, R., & Keudell, A. v. (1993). Moving‐coil waveguide discharge for inner coating of metal tubes. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 11(5), 2508-2517. doi:10.1116/1.578600.

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 Creators:
Hytry, R.1, Author              
Möller, W.1, Author              
Wilhelm, R.2, Author              
Keudell, A. von1, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318              

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Language(s): eng - English
 Dates: 1993
 Publication Status: Published in print
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Degree: -

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Title: Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films
Source Genre: Journal
 Creator(s):
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Publ. Info: -
Pages: - Volume / Issue: 11 (5) Sequence Number: - Start / End Page: 2508 - 2517 Identifier: -