Moving‐coil waveguide discharge for inner coating of metal tubes

Hytry, R.; Möller, W.; Wilhelm, R.; Keudell, A. von

doi:10.1116/1.578600

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Moving‐coil waveguide discharge for inner coating of metal tubes

Hytry, R., Möller, W., Wilhelm, R., & Keudell, A. v. (1993). Moving‐coil waveguide discharge for inner coating of metal tubes. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 11(5), 2508-2517. doi:10.1116/1.578600.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9229-5 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-922A-3

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Urheber:
Hytry, R.¹, Autor
Möller, W.¹, Autor
Wilhelm, R.², Autor
Keudell, A. von¹, Autor

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318