Moving‐coil waveguide discharge for inner coating of metal tubes

Hytry, R.; Möller, W.; Wilhelm, R.; Keudell, A. von

doi:10.1116/1.578600

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Moving‐coil waveguide discharge for inner coating of metal tubes

Hytry, R., Möller, W., Wilhelm, R., & Keudell, A. v. (1993). Moving‐coil waveguide discharge for inner coating of metal tubes. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 11(5), 2508-2517. doi:10.1116/1.578600.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9229-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-922A-3

Genre: Journal Article

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Creators:
Hytry, R.¹, Author
Möller, W.¹, Author
Wilhelm, R.², Author
Keudell, A. von¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318

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Language(s): eng - English

Dates: Date issued: 1993

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 631710
DOI: 10.1116/1.578600
URI: http://avspublications.org/jvsta/resource/1/jvtad6/v11/i5/p2508_s1

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Title: Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films

Source Genre: Journal

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Pages: - Volume / Issue: 11 (5) Sequence Number: - Start / End Page: 2508 - 2517 Identifier: -