Influence of the ion energy on the growth and structure of thin hydrocarbon 
films

Reinke, P.; Jacob, W.; Möller, W.

doi:10.1063/1.354892

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Influence of the ion energy on the growth and structure of thin hydrocarbon films

Reinke, P., Jacob, W., & Möller, W. (1993). Influence of the ion energy on the growth and structure of thin hydrocarbon films. Journal of Applied Physics, 74(2), 1354-1361. doi:10.1063/1.354892.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-924B-8 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-924C-6

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Urheber:
Reinke, P.¹, Autor
Jacob, W.², Autor
Möller, W.², Autor

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288