Ion stimulated densification of amorphous carbon films

Ullmann, J.; Wolf, G. K.; Möller, W.

doi:10.1016/0168-583X(93)90831-P

Local TagsRelease HistoryDetailsSummary

Ion stimulated densification of amorphous carbon films

Ullmann, J., Wolf, G. K., & Möller, W. (1993). Ion stimulated densification of amorphous carbon films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1507-1510. doi:10.1016/0168-583X(93)90831-P.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9273-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9274-A

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Ullmann, J., Author
Wolf, G. K., Author
Möller, W.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

Content

show

hide

Free keywords: 8th International Conference on Ion Beam Modification of Materials, Heidelberg, Germany, 1992-09-07 to 1992-09-11

Abstract: -

Details

show

hide

Language(s): eng - English

Dates: Date issued: 1993

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: Peer

Identifiers: eDoc: 633796
DOI: 10.1016/0168-583X(93)90831-P
URI: http://www.sciencedirect.com/science/article/pii/0168583X9390831P

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: -

Pages: Part 2 Volume / Issue: - Sequence Number: - Start / End Page: 1507 - 1510 Identifier: -