English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
  Plasma and surface modeling of the deposition of hydrogenated carbon films from low-pressure methane plasmas

Möller, W. (1993). Plasma and surface modeling of the deposition of hydrogenated carbon films from low-pressure methane plasmas. Applied Physics A - Materials Science & Processing, 56(6), 527-546. doi:10.1007/BF00331402.

Item is

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Möller, W.1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

Content

show

Details

show
hide
Language(s): eng - English
 Dates: 1993
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show
hide
Title: Applied Physics A - Materials Science & Processing
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 56 (6) Sequence Number: - Start / End Page: 527 - 546 Identifier: -