Modelling and computer simulation of ion-beam- and plasma-assisted film growth

Möller, W.

doi:10.1016/0040-6090(93)90625-Y

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Modelling and computer simulation of ion-beam- and plasma-assisted film growth

Möller, W. (1993). Modelling and computer simulation of ion-beam- and plasma-assisted film growth. Thin Solid Films, 228(1-2), 319-325. doi:10.1016/0040-6090(93)90625-Y.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-927F-3 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9280-E

Genre: Zeitschriftenartikel

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Urheber:
Möller, W.¹, Autor

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Schlagwörter: 12th International Vacuum Congress (IVC-12) / 8th International Conference on Solid Surfaces (ICSS-8), The Hague, Netherlands, 1992-10-12 to 1992-10-16

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