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  Influence of energy reflected from the target on thin film characteristics

Winters, H. F., Coufal, H. J., & Eckstein, W. (1993). Influence of energy reflected from the target on thin film characteristics. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 11(3), 657-663. doi:10.1116/1.578787.

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 Creators:
Winters, H. F., Author
Coufal, H. J., Author
Eckstein, W.1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 1993
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Degree: -

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Title: Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 11 (3) Sequence Number: - Start / End Page: 657 - 663 Identifier: -