Deposition of dense C:H films at elevated substrate temperature

Keudell, A. von; Möller, W.; Hytry, R.

doi:10.1016/0925-9635(93)90063-8

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Deposition of dense C:H films at elevated substrate temperature

Keudell, A. v., Möller, W., & Hytry, R. (1993). Deposition of dense C:H films at elevated substrate temperature. Diamond and Related Materials, 2(2-4), 251-254. doi:10.1016/0925-9635(93)90063-8.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-92B3-B Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-92B4-9

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Urheber:
Keudell, A. von¹, Autor
Möller, W.¹, Autor
Hytry, R.¹, Autor

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Schlagwörter: DIAMOND 92 - 3rd International Conference on the new Diamond Science and Technology / 3rd European Conference on Diamond, Diamond-Like and Related Compounds, Heidelberg, Germany, 1992-08-31 to 1992-09-04

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