Ion energy distributions from electron cyclotron resonance methane plasmas

Jacob, W.; Reinke, P.; Möller, W.

doi:10.1016/0925-9635(93)90086-H

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Ion energy distributions from electron cyclotron resonance methane plasmas

Jacob, W., Reinke, P., & Möller, W. (1993). Ion energy distributions from electron cyclotron resonance methane plasmas. Diamond and Related Materials, 2(2-4), 378-382. doi:10.1016/0925-9635(93)90086-H.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-92B5-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-92B6-5

Genre: Journal Article

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Creators:
Jacob, W.¹, Author
Reinke, P.², Author
Möller, W.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22

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Free keywords: DIAMOND 92 - 3rd International Conference on the new Diamond Science and Technology / 3rd European Conference on Diamond, Diamond-Like and Related Compounds, Heidelberg, Germany, 1992-08-31 to 1992-09-04

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Language(s): eng - English

Dates: Date issued: 1993

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 646496
DOI: 10.1016/0925-9635(93)90086-H
URI: http://www.sciencedirect.com/science/article/pii/092596359390086H

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Title: Diamond and Related Materials

Source Genre: Journal

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Pages: - Volume / Issue: 2 (2-4) Sequence Number: - Start / End Page: 378 - 382 Identifier: -