Ion energy distributions from electron cyclotron resonance methane plasmas

Jacob, W.; Reinke, P.; Möller, W.

doi:10.1016/0925-9635(93)90086-H

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Ion energy distributions from electron cyclotron resonance methane plasmas

Jacob, W., Reinke, P., & Möller, W. (1993). Ion energy distributions from electron cyclotron resonance methane plasmas. Diamond and Related Materials, 2(2-4), 378-382. doi:10.1016/0925-9635(93)90086-H.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-92B5-7 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-92B6-5

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Urheber:
Jacob, W.¹, Autor
Reinke, P.², Autor
Möller, W.¹, Autor

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22

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Schlagwörter: DIAMOND 92 - 3rd International Conference on the new Diamond Science and Technology / 3rd European Conference on Diamond, Diamond-Like and Related Compounds, Heidelberg, Germany, 1992-08-31 to 1992-09-04

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