Collision dominated preferential sputtering of tantalum oxide

Baretzky, B.; Möller, W.; Taglauer, E.

doi:10.1016/0042-207X(92)90025-R

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Collision dominated preferential sputtering of tantalum oxide

Baretzky, B., Möller, W., & Taglauer, E. (1992). Collision dominated preferential sputtering of tantalum oxide. Vacuum, 43(12), 1207-1216. doi:10.1016/0042-207X(92)90025-R.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9460-2 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9461-F

Genre: Journal Article

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Creators:
Baretzky, B.¹, Author
Möller, W.², Author
Taglauer, E.², Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1992

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 655159
DOI: 10.1016/0042-207X(92)90025-R
URI: http://www.sciencedirect.com/science/article/pii/0042207X9290025R

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Title: Vacuum

Source Genre: Journal

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Pages: - Volume / Issue: 43 (12) Sequence Number: - Start / End Page: 1207 - 1216 Identifier: -