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  Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma

Reinke, P., Schelz, S., Jacob, W., & Möller, W. (1992). Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 10(3), 434-438. doi:10.1116/1.578167.

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 Creators:
Reinke, P.1, Author              
Schelz, S.2, Author
Jacob, W.3, Author              
Möller, W.3, Author              
Affiliations:
1External Organizations, ou_persistent22              
2Max Planck Society, ou_persistent13              
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 1992
 Publication Status: Published in print
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Degree: -

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Title: Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 10 (3) Sequence Number: - Start / End Page: 434 - 438 Identifier: -