Influence of a direct current bias on the energy of ions from an electron 
cyclotron resonance plasma

Reinke, P.; Schelz, S.; Jacob, W.; Möller, W.

doi:10.1116/1.578167

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Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma

Reinke, P., Schelz, S., Jacob, W., & Möller, W. (1992). Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 10(3), 434-438. doi:10.1116/1.578167.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-94F0-D Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-94F1-B

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Urheber:
Reinke, P.¹, Autor
Schelz, S.², Autor
Jacob, W.³, Autor
Möller, W.³, Autor

Affiliations:
1External Organizations, ou_persistent22
2Max Planck Society, ou_persistent13
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288