English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
  Ion Energy Distribution at the Substrate in an ECR-Reactor

Reinke, P., Jacob, W., & Moeller, W. (1991). Ion Energy Distribution at the Substrate in an ECR-Reactor. In R. E. Clausing, J. C. Angus, & P. Koidl (Eds.), Diamond and Diamond-like Films and Coatings. Proceedings of a Nato Advanced Study Institute (pp. 661-667). New York, NY: Plenum Press.

Item is

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Reinke, P.1, Author              
Jacob, W.1, Author              
Moeller, W.1, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

Content

show

Details

show
hide
Language(s): eng - English
 Dates: 1991
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 630160
 Degree: -

Event

show
hide
Title: Diamond and Diamond-like Films and Coatings
Place of Event: Castelvecchio Pascoli (IT)
Start-/End Date: 1990-07-22 - 1990-08-03

Legal Case

show

Project information

show

Source 1

show
hide
Title: Diamond and Diamond-like Films and Coatings. Proceedings of a Nato Advanced Study Institute
Source Genre: Proceedings
 Creator(s):
Clausing, R. E., Editor
Angus, J. C., Editor
Koidl, P., Editor
Affiliations:
-
Publ. Info: New York, NY : Plenum Press
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 661 - 667 Identifier: -

Source 2

show
hide
Title: NATO ASI Series. B: Physics
Source Genre: Series
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 266 Sequence Number: - Start / End Page: - Identifier: -