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  Ion Energy Distribution at the Substrate in an ECR-Reactor

Reinke, P., Jacob, W., & Moeller, W. (1991). Ion Energy Distribution at the Substrate in an ECR-Reactor. In R. E. Clausing, J. C. Angus, & P. Koidl (Eds.), Diamond and Diamond-like Films and Coatings. Proceedings of a Nato Advanced Study Institute (pp. 661-667). New York, NY: Plenum Press.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9672-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9673-A
Genre: Conference Paper

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 Creators:
Reinke, P.1, Author           
Jacob, W.1, Author           
Moeller, W.1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 1991
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 630160
 Degree: -

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Title: Diamond and Diamond-like Films and Coatings
Place of Event: Castelvecchio Pascoli (IT)
Start-/End Date: 1990-07-22 - 1990-08-03

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Title: Diamond and Diamond-like Films and Coatings. Proceedings of a Nato Advanced Study Institute
Source Genre: Proceedings
 Creator(s):
Clausing, R. E., Editor
Angus, J. C., Editor
Koidl, P., Editor
Affiliations:
-
Publ. Info: New York, NY : Plenum Press
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 661 - 667 Identifier: -

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Title: NATO ASI Series. B: Physics
Source Genre: Series
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Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 266 Sequence Number: - Start / End Page: - Identifier: -