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  Measuring electro-mechanical properties of thin films on polymer substrates

Cordill, M. J., Glushko, O., Kreith, J., Marx, V. M., & Kirchlechner, C. (2015). Measuring electro-mechanical properties of thin films on polymer substrates. Microelectronic Engineering, 137(1), 96-100. doi:10.1016/j.mee.2014.08.002.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0023-C731-3 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0027-F4B6-D
Genre: Journal Article

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 Creators:
Cordill, Megan Jo1, Author              
Glushko, Oleksandr2, Author              
Kreith, Josef3, Author              
Marx, Vera Maria4, Author              
Kirchlechner, Christoph5, Author              
Affiliations:
1Erich Schmid Institute of Materials Science, Leoben, Austria, ou_persistent22              
2Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, Leoben, Austria, ou_persistent22              
3Department of Material Physics, Montanuniversität Leoben, Jahnstrasse 12, Leoben, Austria, ou_persistent22              
4Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863398              
5Nano-/ Micromechanics of Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863401              

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Language(s): eng - English
 Dates: 2015
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: -
 Identifiers: DOI: 10.1016/j.mee.2014.08.002
 Degree: -

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Title: Microelectronic Engineering
Source Genre: Journal
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Publ. Info: Amsterdam : Elsevier
Pages: 5 Volume / Issue: 137 (1) Sequence Number: - Start / End Page: 96 - 100 Identifier: ISSN: 0167-9317
CoNE: /journals/resource/954925484690