Measuring electro-mechanical properties of thin films on polymer substrates

Cordill, Megan Jo; Glushko, Oleksandr; Kreith, Josef; Marx, Vera Maria; Kirchlechner, Christoph

doi:10.1016/j.mee.2014.08.002

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Measuring electro-mechanical properties of thin films on polymer substrates

Cordill, M. J., Glushko, O., Kreith, J., Marx, V. M., & Kirchlechner, C. (2015). Measuring electro-mechanical properties of thin films on polymer substrates. Microelectronic Engineering, 137(1), 96-100. doi:10.1016/j.mee.2014.08.002.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0023-C731-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-F4B6-D

Genre: Journal Article

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Creators:
Cordill, Megan Jo¹, Author
Glushko, Oleksandr², Author
Kreith, Josef³, Author
Marx, Vera Maria⁴, Author
Kirchlechner, Christoph⁵, Author

Affiliations:
1Erich Schmid Institute of Materials Science, Leoben, Austria, ou_persistent22
2Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Jahnstrasse 12, Leoben, Austria, ou_persistent22
3Department of Material Physics, Montanuniversität Leoben, Jahnstrasse 12, Leoben, Austria, ou_persistent22
4Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863398
5Nano-/ Micromechanics of Materials, Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863401

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Language(s): eng - English

Dates: Date issued: 2015

Publication Status: Issued

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Identifiers: DOI: 10.1016/j.mee.2014.08.002

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Title: Microelectronic Engineering

Source Genre: Journal

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Publ. Info: Amsterdam : Elsevier

Pages: 5 Volume / Issue: 137 (1) Sequence Number: - Start / End Page: 96 - 100 Identifier: ISSN: 0167-9317
CoNE: https://pure.mpg.de/cone/journals/resource/954925484690