A simple design for the transportation of ex-situ prepared hydrogen passivated 
silicon

MacLaren, D. A.; Curson, N. J.; Atkinson, P.; Holst, B.; Johnson, D. J.; Allison, W.

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A simple design for the transportation of ex-situ prepared hydrogen passivated silicon

MacLaren, D. A., Curson, N. J., Atkinson, P., Holst, B., Johnson, D. J., & Allison, W. (2002). A simple design for the transportation of ex-situ prepared hydrogen passivated silicon. Journal of Vacuum Science and Technology A, 20, 285-287.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0029-17C4-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0029-17C5-C

Genre: Journal Article

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Creators:
MacLaren, D. A., Author
Curson, N. J., Author
Atkinson, P., Author
Holst, B.¹, Author
Johnson, D. J., Author
Allison, W., Author

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1Max Planck Society, ou_persistent13

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Language(s): eng - English

Dates: Date issued: 2002

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 27226

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Title: Journal of Vacuum Science and Technology A

Source Genre: Journal

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Pages: - Volume / Issue: 20 Sequence Number: - Start / End Page: 285 - 287 Identifier: -