Polymer masks on semiconductors: A novel way to nanostructures

Haupt, M.; Miller, S.; Bitzer, K.; Thonke, K.; Sauer, R.; Spatz, Joachim P.; Mossmer, S.; Hartmann, C.; Moller, M.

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Polymer masks on semiconductors: A novel way to nanostructures

Haupt, M., Miller, S., Bitzer, K., Thonke, K., Sauer, R., Spatz, J. P., et al. (2001). Polymer masks on semiconductors: A novel way to nanostructures. Physica Status Solidi B, 224(3), 867-870.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0029-C95A-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-002C-6045-E

Genre: Journal Article

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Creators:
Haupt, M.¹, Author
Miller, S.¹, Author
Bitzer, K.¹, Author
Thonke, K.¹, Author
Sauer, R.¹, Author
Spatz, Joachim P.¹, Author
Mossmer, S.¹, Author
Hartmann, C.¹, Author
Moller, M.¹, Author

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1External Organizations, ou_persistent22

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Dates: Date issued: 2001-04

Publication Status: Issued

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Identifiers: ISI: ISI:000168432100049
ISSN: 0370-1972

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Title: Physica Status Solidi B

Abbreviation : Phys. Stat. Sol. B

Source Genre: Journal

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Publ. Info: Weinheim : Wiley-VCH

Pages: - Volume / Issue: 224 (3) Sequence Number: - Start / End Page: 867 - 870 Identifier: ISSN: 0370-1972
CoNE: https://pure.mpg.de/cone/journals/resource/958480240330