Materials Surface Modification by Plasma Bombardment Under Simultaneous Erosion 
and Redeposition Conditions

Hirooka, Y.; Bohdansky, J.; Goebel, D.M.; Conn, R.W.; Campbell, G.A.; Leung, W.K.; Wilson, K.L.; Bauer, W.; Causey, R.A.; Morse, D.H.

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Materials Surface Modification by Plasma Bombardment Under Simultaneous Erosion and Redeposition Conditions

Hirooka, Y., Bohdansky, J., Goebel, D., Conn, R., Campbell, G., Leung, W., et al. (1987). Materials Surface Modification by Plasma Bombardment Under Simultaneous Erosion and Redeposition Conditions. Nuclear Instruments and Methods in Physics Research. B, 23, 4, 458-470.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A0FC-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A0FD-C

Genre: Journal Article

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Creators:
Hirooka, Y.¹, Author
Bohdansky, J.², Author
Goebel, D.M.¹, Author
Conn, R.W.¹, Author
Campbell, G.A.¹, Author
Leung, W.K.¹, Author
Wilson, K.L.¹, Author
Bauer, W.¹, Author
Causey, R.A.¹, Author
Morse, D.H.¹, Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Published in Print: 1987

Publication Status: Published in print

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Title: Nuclear Instruments and Methods in Physics Research. B

Source Genre: Journal

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Pages: - Volume / Issue: 23, 4 Sequence Number: - Start / End Page: 458 - 470 Identifier: -