Sputtering Studies with the Monte Carlo Program TRIM.SP

Biersack, J.P.; Eckstein, W.

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Sputtering Studies with the Monte Carlo Program TRIM.SP

Biersack, J., & Eckstein, W. (1984). Sputtering Studies with the Monte Carlo Program TRIM.SP. Applied Physics, 34, 73.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A2F1-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A2F2-3

Genre: Journal Article

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Creators:
Biersack, J.P.¹, Author
Eckstein, W.², Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1984

Publication Status: Issued

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Title: Applied Physics

Source Genre: Journal

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Pages: - Volume / Issue: 34 Sequence Number: - Start / End Page: 73 Identifier: -