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  Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point

Bohdansky, J., Lindner, H., Hechtl, E., Martinelli, A., & Roth, J. (1987). Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point. Nuclear Instruments and Methods in Physics Research. B, 18, 509-514.

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 Creators:
Bohdansky, J.1, Author           
Lindner, H.2, Author           
Hechtl, E.3, Author
Martinelli, A.P.3, Author
Roth, J.1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
2Max Planck Institute for Plasma Physics, ou_persistent27              
3External Organizations, ou_persistent22              

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 Dates: 1987
 Publication Status: Published in print
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Title: Nuclear Instruments and Methods in Physics Research. B
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: 18 Sequence Number: - Start / End Page: 509 - 514 Identifier: -