Computer Simulation of Low Energy Static Single Crystal Sputtering

Hou, M.; Eckstein, W.

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Computer Simulation of Low Energy Static Single Crystal Sputtering

Hou, M., & Eckstein, W. (1986). Computer Simulation of Low Energy Static Single Crystal Sputtering. Nuclear Instruments and Methods in Physics Research. B, 13, 324.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A3A5-7 Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A3A6-5

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Urheber:
Hou, M.¹, Autor
Eckstein, W.², Autor

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288