Ion Gun Systems for Submicron SIMS

Liebl, H.; Benninghoven, A.

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Ion Gun Systems for Submicron SIMS

Liebl, H., & Benninghoven, A. (1984). Ion Gun Systems for Submicron SIMS. In Secondary Ion Mass Spectrometry SIMS IV (pp. 114).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A3C1-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A3C2-7

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Creators:
Liebl, H.¹, Author
Benninghoven, A.², Author

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1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22

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Dates: Date issued: 1984

Publication Status: Issued

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Title: Secondary Ion Mass Spectrometry SIMS IV

Source Genre: Book

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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 114 Identifier: -