Sputtering with Light Ions

Roth, J.; Varga, P.

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Sputtering with Light Ions

Roth, J., & Varga, P. (n.d.). Sputtering with Light Ions. In Symposium on Sputtering (pp. 773).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A418-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A419-C

Genre: Conference Paper

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Creators:
Roth, J.^{1, 2, 3}, Author
Varga, P.⁴, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327
3Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328
4External Organizations, ou_persistent22

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Title: Symposium on Sputtering

Place of Event: Wien (AT)

Start-/End Date: 1980-01-01

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Title: Symposium on Sputtering

Source Genre: Proceedings

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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 773 Identifier: -