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  Contributions of Backscattered Ions to Sputtering Yields Depending on Primary Ion Energy

Weissmann, R., & Behrisch, R. (1973). Contributions of Backscattered Ions to Sputtering Yields Depending on Primary Ion Energy. Ion Surface Interaction, 19, 55-61.

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 Creators:
Weissmann, R.1, Author              
Behrisch, R.1, Author              
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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 Dates: 1973
 Publication Status: Published in print
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Title: Ion Surface Interaction
Place of Event: Garching (DE)
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Title: Ion Surface Interaction
Source Genre: Journal
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Pages: - Volume / Issue: 19 Sequence Number: - Start / End Page: 55 - 61 Identifier: -