Contributions of Backscattered Ions to Sputtering Yields Depending on Primary 
Ion Energy

Weissmann, R.; Behrisch, R.

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Contributions of Backscattered Ions to Sputtering Yields Depending on Primary Ion Energy

Weissmann, R., & Behrisch, R. (1973). Contributions of Backscattered Ions to Sputtering Yields Depending on Primary Ion Energy. Ion Surface Interaction, 19, 55-61.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B161-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B162-E

Genre: Conference Paper

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Creators:
Weissmann, R.¹, Author
Behrisch, R.¹, Author

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1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1973

Publication Status: Issued

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Title: Ion Surface Interaction

Place of Event: Garching (DE)

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Title: Ion Surface Interaction

Source Genre: Journal

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Pages: - Volume / Issue: 19 Sequence Number: - Start / End Page: 55 - 61 Identifier: -