Double Chamber Partial Pressure Gauge

Rasskopf, K.; Liebl, H.; Blauth, E.W.

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Double Chamber Partial Pressure Gauge

Rasskopf, K., Liebl, H., & Blauth, E. (1972). Double Chamber Partial Pressure Gauge. Journal of Vacuum Science and Technology, 9, 1, 492-495.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B19C-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B19D-C

Genre: Journal Article

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Creators:
Rasskopf, K.¹, Author
Liebl, H.², Author
Blauth, E.W.³, Author

Affiliations:
1Max Planck Institute for Plasma Physics, ou_persistent27
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
3External Organizations, ou_persistent22

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Dates: Date issued: 1972

Publication Status: Issued

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Title: Journal of Vacuum Science and Technology

Source Genre: Journal

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Pages: - Volume / Issue: 9, 1 Sequence Number: - Start / End Page: 492 - 495 Identifier: -