Glow-Discharge Mass Spectrometry-Technique for Determining Elemental 
Composition Profiles in Solids

Coburn, J.W.; Taglauer, E.; Kay, E.

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Glow-Discharge Mass Spectrometry-Technique for Determining Elemental Composition Profiles in Solids

Coburn, J., Taglauer, E., & Kay, E. (1974). Glow-Discharge Mass Spectrometry-Technique for Determining Elemental Composition Profiles in Solids. Journal of Applied Physics, 45, 5, 1779-1786.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B481-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B482-3

Genre: Journal Article

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Creators:
Coburn, J.W.¹, Author
Taglauer, E.², Author
Kay, E.¹, Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1974

Publication Status: Issued

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Title: Journal of Applied Physics

Source Genre: Journal

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Pages: - Volume / Issue: 45, 5 Sequence Number: - Start / End Page: 1779 - 1786 Identifier: -