Depth Distribution of Damage Obtained by Rutherford Backscattering Combined 
with Channeling

Behrisch, R.; Meyer, O.; Roth, J.

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Depth Distribution of Damage Obtained by Rutherford Backscattering Combined with Channeling

Behrisch, R., Meyer, O., & Roth, J. (1976). Depth Distribution of Damage Obtained by Rutherford Backscattering Combined with Channeling. In Ion Beam Surface Layer Analysis (pp. 539-565).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B6F8-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B6FA-5

Genre: Book Chapter

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Creators:
Behrisch, R.¹, Author
Meyer, O.², Author
Roth, J.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2External Organizations, ou_persistent22

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Dates: Date issued: 1976

Publication Status: Issued

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Title: Ion Beam Surface Layer Analysis

Source Genre: Book

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Pages: - Volume / Issue: Vol. 2 Sequence Number: - Start / End Page: 539 - 565 Identifier: -