Elemental Composition Profiling in Thin Films by Glowdischarge Mass 
Spectrometry: Depth Resolution

Coburn, J.W.; Eckstein, E.W.; Kay, E.

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Elemental Composition Profiling in Thin Films by Glowdischarge Mass Spectrometry: Depth Resolution

Coburn, J., Eckstein, E., & Kay, E. (1975). Elemental Composition Profiling in Thin Films by Glowdischarge Mass Spectrometry: Depth Resolution. Journal of Applied Physics, 46, 7, 2828-2830.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B72E-B Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B72F-9

Genre: Journal Article

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Coburn, J.W.¹, Author
Eckstein, E.W.¹, Author
Kay, E.¹, Author

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1External Organizations, ou_persistent22

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Dates: Date issued: 1975

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Title: Journal of Applied Physics

Source Genre: Journal

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Pages: - Volume / Issue: 46, 7 Sequence Number: - Start / End Page: 2828 - 2830 Identifier: -