Sputtering Calculations for Low Energy Light Ions

Behrisch, R.; Maderlechner, G.; Scherzer, B.M.U.

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Sputtering Calculations for Low Energy Light Ions

Behrisch, R., Maderlechner, G., & Scherzer, B. (1978). Sputtering Calculations for Low Energy Light Ions. In Atomic and Surface Physics (pp. 33-37).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-BC59-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-BC5A-C

Genre: Conference Paper

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Creators:
Behrisch, R.¹, Author
Maderlechner, G.², Author
Scherzer, B.M.U.³, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Max Planck Institute for Plasma Physics, ou_persistent27
3External Organizations, ou_persistent22

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Dates: Date issued: 1978

Publication Status: Issued

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Title: Atomic and Surface Physics

Place of Event: Innsbruck (AT)

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Title: Atomic and Surface Physics

Source Genre: Proceedings

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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 33 - 37 Identifier: -